✦ LIBER ✦
Nonlinear dynamics of radio frequency plasma processing reactors powered by multifrequency sources
✍ Scribed by Rauf, S.; Kushner, M.J.
- Book ID
- 114558834
- Publisher
- IEEE
- Year
- 1999
- Tongue
- English
- Weight
- 171 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0093-3813
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