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Nonlinear control strategy for thermal budget in spike rapid thermal processing systems based on Wiener model

✍ Scribed by Jyh-Cheng Jeng; Wen-Chung Chen

Book ID: 112001744
Publisher: Wiley (John Wiley & Sons)
Year: 2011
Tongue: English
Weight: 256 KB
Volume: 7
Category: Article
ISSN: 1932-2135
DOI: 10.1002/apj.612

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