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Noninterferometric topography measurements of fast moving surfaces

โœ Scribed by Pinhasi, Shirly Vinikman; Eliezer, Shalom; Glam, Benny; Appelbaum, Gabi; Bakshi, Lior

Book ID
115392133
Publisher
Optical Society of America
Year
2011
Tongue
English
Weight
781 KB
Volume
28
Category
Article
ISSN
1084-7529

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The accuracy of fast 3D topography measu
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One important factor in surface engineering is the evaluation of the surface topography, i.e. measurement and analysis. These measurements of the surface roughness are normally done by stylus instruments and 2D profiles due to available standards. 3D surface topography evaluation is, however, in som