✦ LIBER ✦
Nondestructive SEM studies of localised defects in gate dielectric films of MIS devices : O. K. Griffith, M. M. E. Beguwala and R. E. Johnson. Proc. IEEE Reliab. Phys. p. 275 (April 1976)
- Publisher
- Elsevier Science
- Year
- 1977
- Tongue
- English
- Weight
- 126 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0026-2714
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