Nondestructive III–V epitaxial layer thickness measurements in the visible and near IR by reflectance spectroscopy

✍ Scribed by Tarof, Lawrence E.

• Book ID: 115339808
• Publisher: The Optical Society
• Year: 1988
• Tongue: English
• Weight: 510 KB
• Volume: 27
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.27.004798