✦ LIBER ✦
Noncontact surface temperature measurement during reactive‐ion etching using fluorescent polymer films
✍ Scribed by Kolodner, Paul; Katzir, A.; Hartsough, Neal
- Book ID
- 111675475
- Publisher
- American Institute of Physics
- Year
- 1983
- Tongue
- English
- Weight
- 503 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.94049
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