Noncontact Carrier Lifetime Depth Profiling of Ion-Implanted Si Using Photothermal Radiometry

✍ Scribed by Othonos, A. ;Salnick, A. ;Mandelis, A. ;Christofides, C.

• Publisher: John Wiley and Sons
• Year: 1997
• Tongue: English
• Weight: 140 KB
• Volume: 161
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/1521-396x(199706)161:2<r13::aid-pssa999913>3.0.co;2-h