✦ LIBER ✦
Non-Steady-State Combined Process of Etching and Imidization of Polyamidoacid Film in Nonequilibrium Oxygen Plasma
✍ Scribed by I. I. Amirov; P. G. Buyanovskaya
- Book ID
- 111567257
- Publisher
- SP MAIK Nauka/Interperiodica
- Year
- 2000
- Tongue
- English
- Weight
- 56 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0018-1439
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