Non-mass analysed ion implantation using microwave ion source : K. Tokiguchi, H. Itoh, N. Sakudo, H. Koike and T. Saitoh. Vacuum36(1–3), 11 (1986)

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 135 KB
• Volume: 27
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(87)90296-4