✦ LIBER ✦
Non-ideal effects improvement of SF6 plasma treated hafnium oxide film based on electrolyte–insulator–semiconductor structure for pH-sensor application
✍ Scribed by Tseng-Fu Lu; Jer-Chyi Wang; Chia-Ming Yang; Chung-Po Chang; Kuan-I Ho; Chi-Fong Ai; Chao-Sung Lai
- Book ID
- 108210860
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 555 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0026-2714
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