Non-equilibrium radial and axial transport in RF glow discharges

✍ Scribed by Tsai, Jyun-Hwei; Wu, Chwan-Hwa John

• Book ID: 120232665
• Publisher: Institute of Physics
• Year: 1993
• Tongue: English
• Weight: 301 KB
• Volume: 26
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/26/3/025