✦ LIBER ✦
Non-destructive high-resolution X-ray imaging of ULSI micro-electronics using keV X-ray microscopy in Zernike phase contrast
✍ Scribed by Ulrich Neuhäusler; Gerd Schneider
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 310 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0167-9317
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