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Non-destructive determination of nitrogen in diamond by phtoactivation

✍ Scribed by G.G. Rocco; Oro Lucy Garzón; J.P. Cali

Publisher
Elsevier Science
Year
1966
Weight
491 KB
Volume
17
Category
Article
ISSN
0020-708X

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Non-destructive characterization of nitr
Non-destructive characterization of nitrogen-implanted silicon-on-insulator structures by spectroscopic ellipsometry
✍ M. Fried; T. Lohner; J.M.M. De Nijs; A. Van Silfhout; L.J. Hanekamp; N.Q. Khanh; 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 465 KB

## 1. Introduction Silicon-on-insulator (SO1) structures implanted with 200 or 400 keV N ÷ ions at a dose of 7.5×1017cm 2 were studied by spectroscopic ellipsometry (SE). The SE measurements were carried out in the 300-700 nm wavelength (4.13-1.78 eV photon energy) range. The SE data were analysed