✦ LIBER ✦
Non-destructive and quantitative analysis of buried interfaces of Si-related crystalline multilayers using high-energy ion scattering
✍ Scribed by T. Ito; E. Kamiya; J. Moon; A. Hiraki
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 295 KB
- Volume
- 56-58
- Category
- Article
- ISSN
- 0169-4332
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