Non-contact charge-voltage method for dielectric characterization on small test areas of IC product wafers

✍ Scribed by Piotr Edelman; Dmitriy Marinskiy; Carlos Almeida; Joseph N. Kochey; Anton Byelyayev; Marshall Wilson; Alexandre Savtchouk; John D’Amico; Andrew Findlay; Lubek Jastrzebski; Jacek Lagowski

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 258 KB
• Volume: 9
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2006.01.042