Non-alloyed, refractory metal contact optimization with shallow implantations of Zn and Mg

✍ Scribed by M.L. Lovejoy; J.C. Zolper; M.E. Sherwin; A.G. Baca; R.J. Shul; D.J. Rieger; J.F. Klem

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 506 KB
• Volume: 253
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(94)90373-5