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Non-additive sputtering of niobium and tantalum as neutral and charged clusters

✍ Scribed by S.F Belykh; V.V Palitsin; I.V Veryovkin; A Adriaens; F Adams

Book ID: 114166802
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 167 KB
Volume: 203
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(02)02212-7

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