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Noise in porous silicon structures in air and in conditions of gas adsorption

✍ Scribed by Z. H. Mkhitaryan; A. A. Shatveryan; V. M. Aroutiounian; F. V. Gasparyan

Book ID
111505613
Publisher
Allerton Press, Inc.
Year
2008
Tongue
English
Weight
262 KB
Volume
43
Category
Article
ISSN
1068-3372

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## Abstract The dependence of humidity adsorption in porous silicon (PS) layers on the fabrication conditions (current density and oxidation) has been investigated. As‐prepared and additionally oxidized PS layers have been investigated using physical gas (N~2~) adsorption measurement at 77 K, water