Nitrogen-rich silicon nitride thin films for deep-ultraviolet Mirau interferometry

✍ Scribed by Chang, F. C.; Kino, G. S.

• Book ID: 115422368
• Publisher: Optical Society of America
• Year: 1997
• Tongue: English
• Weight: 301 KB
• Volume: 22
• Category: Article
• ISSN: 0146-9592
• DOI: 10.1364/OL.22.000492