✦ LIBER ✦
Nitrogen incorporation during N20- and NO-oxidation of silicon at temperatures down to 600°C
✍ Scribed by G. Weidner; D. Krüger; M. Weidner; T. Grabolla
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 672 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0026-2692
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