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Nitrogen atom recombination in high pressure Ar-N 2 flowing post-discharges

✍ Scribed by Ricard, A; Tetreault, J; Hubert, J

Book ID
125542817
Publisher
Institute of Physics
Year
1991
Tongue
English
Weight
338 KB
Volume
24
Category
Article
ISSN
0953-4075

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High nitrogen atom densities (10~5-10 " cm-3) have been produced in high pressure (20-760 Torr) Ar-N~ flowing post-discharges. Gas ionization is performed by 2.45 GHz surfatron and surfaguide exciters with 100-200 W transmitted power. Nitrogen atoms have been measured by NO titration and by the abso