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Nitriding of steel by atmospheric nitrogen in arc discharge plasma

✍ Scribed by V. S. Vanin

Publisher
Springer
Year
1973
Tongue
English
Weight
191 KB
Volume
6
Category
Article
ISSN
1573-885X

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## Abstract A magnetically driven carbon‐shunting arc discharge was generated in nitrogen gas circumstance and amorphous carbon nitride (a‐CN__~x~__) films were prepared. A silicon substrate was immersed into the plasma, and a series of pulse voltage was applied to the substrate synchronizing with