Nitriding mechanisms in ArN2, ArN2H2 and ArNH3 mixtures in D.C. Glow discharges at low pressures (less than 10 Torr)

✍ Scribed by R. Avni; T. Spalvins

• Book ID: 107827681
• Publisher: Elsevier Science
• Year: 1987
• Weight: 697 KB
• Volume: 95
• Category: Article
• ISSN: 0025-5416
• DOI: 10.1016/0025-5416(87)90515-5