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Nitridation of silicon compact in a gas mixture of nitrogen and hydrogen

✍ Scribed by Yachio Seki; Masatane Kadota; Isao Kondoh; Tsuneo Uetsuki


Book ID
116117918
Publisher
Elsevier Science
Year
1987
Weight
65 KB
Volume
3
Category
Article
ISSN
0267-3762

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