✦ LIBER ✦
NiSi contact metallization using electroless Ni deposition on Pd-activated self-assembled monolayer (SAM) on p-type Si(1 0 0)
✍ Scribed by A. Duhin; Y. Sverdlov; I. Torchinsky; Yishay Feldman; Y. Shacham-Diamand
- Book ID
- 104051801
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 603 KB
- Volume
- 84
- Category
- Article
- ISSN
- 0167-9317
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