✦ LIBER ✦
Niobium nitride films formed by rapid thermal processing (RTP): a study of depth profiles and interface reactions by complementary analytical techniques
✍ Scribed by A. Berendes; O. Brunkahl; C. Angelkort; W. Bock; F. Hofer; P. Warbichler; B. O. Kolbesen
- Publisher
- Springer
- Year
- 2004
- Tongue
- English
- Weight
- 783 KB
- Volume
- 379
- Category
- Article
- ISSN
- 1618-2650
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