NIL—a low-cost and high-throughput MEMS fabrication method compatible with IC manufacturing technology

✍ Scribed by Xiqiu Fan; Honghai Zhang; Sheng Liu; Xiaofeng Hu; Ke Jia

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 631 KB
• Volume: 37
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/j.mejo.2005.04.047