Nickel silicidation techniques for strained Si1−xGex, Si1−x−yGexCy, and Si1−yCyalloys material-device applications

✍ Scribed by Zhongha Shi; David Onsongo; Xiao Chen; Dong-won Kim; Renee E. Nieh; Sanjay K. Banerjee

• Book ID: 107453055
• Publisher: Springer US
• Year: 2003
• Tongue: English
• Weight: 521 KB
• Volume: 32
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/s11664-003-0191-2