✦ LIBER ✦
Nickel Germanosilicide contacts formed on heavily boron doped Si1-xGex source/drain junctions for nanoscale CMOS
✍ Scribed by Jing Liu; Ozturk, M.C.
- Book ID
- 114617845
- Publisher
- IEEE
- Year
- 2005
- Tongue
- English
- Weight
- 713 KB
- Volume
- 52
- Category
- Article
- ISSN
- 0018-9383
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