Next Generation Micro/Nano Systems......Page 2
Preface and Committees......Page 5
Table of Contents......Page 8
History and Recent Progress of MEMS Physical Sensors......Page 9
Continuous Process for Large-Area Flexible MEMS......Page 17
Novel Plasmonic Bio-Sensing System Based on Two-Dimensional Gold Patch Arrays for Linear and Nonlinear Regimes......Page 23
Micromachined Devices for Use in Terahertz Applications......Page 28
Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon......Page 36
Wet-Etching Characteristics of SiCN Films Deposited by HWCVD Method......Page 42
Modeling of Piezo-Actuated Stick-Slip Micro-Drives: An Overview......Page 47
Foreign Bodies โ The Creation of Symbiotic Jewellery through the Development and Application of Stimulus-Responsive Smart Materials and Microelectromechanical Systems......Page 57
Integrated Microsystems......Page 63
RF-MEMS Components and Networks for High-Performance Reconfigurable Telecommunication and Wireless Systems......Page 73
Functional RF Devices Powered by MEMS Technologies......Page 83
Microfluidic Microchemomechanical Systems......Page 92
Hydrogel-Based Microfluidic Systems......Page 98
Super-Hydrophilic PDMS and PET Surfaces for Microfluidic Devices......Page 104
New Viscosity Data for CuO-Water Nanofluid โ The Hysteresis Phenomenon Revisited......Page 109
Keywords Index......Page 115
Authors Index......Page 117