✦ LIBER ✦
New techniques to characterize properties of advanced dielectric barriers for sub-65 nm technology node
✍ Scribed by J. Vitiello; V. Ducote; A. Farcy; L.G. Gosset; Y. Le-Friec; M. Hopstaken; S. Jullian; M. Cordeau; C. Ailhas; L.L. Chapelon; D. Barbier; M. Veillerot; A. Danel; J. Torres
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 583 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0167-9317
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