✦ LIBER ✦

New techniques in electron energy-loss spectroscopy and energy-filtered imaging

✍ Scribed by R.F. Egerton

Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 279 KB
Volume: 34
Category: Article
ISSN: 0968-4328
DOI: 10.1016/s0968-4328(03)00023-4

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✦ Synopsis

This article is a survey of hardware and software advances that promise to increase the power and sensitivity of electron energy-loss spectroscopy (EELS) and energy-filtered imaging (EFTEM) in a transmission electron microscope. Recent developments include electron-gun monochromators, lens-aberration correctors, and software for spectral sharpening, spectral processing and interpretation of fine structure. Future improvements could include the deployment of new electron sources. The expected enhancements in energy and spatial resolution are compared with fundamental limitations that arise from the natural widths of spectral peaks, the delocalization of inelastic scattering and the problem of electron-irradiation damage.

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