New production tools from Unaxis

• Book ID: 104367329
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 183 KB
• Volume: 17
• Category: Article
• ISSN: 0961-1290
• DOI: 10.1016/s0961-1290(04)00650-7

✦ Synopsis

Unaxis Wafer Processing has launched two production tools, the Versaline and the LLS EVO II. Built on a decade of dry etching system experience, Versaline is a modular system that enables etching and deposition technologies. Its ICP, RIE, PECVD and PVD modules provide solutions for applications such as LEDs, HBTs, HEMTs and MEMS. LLS EVO II is a batch sputtering system, with five sources, each configurable for sputtering options including DC, RF, RF/DC, pulsed DC, and co-sputtering.