✦ LIBER ✦
New planar magnetron system for ferromagnetic targets–Magnetic field distribution near the target surface
✍ Scribed by Takakazu Takahashi; Junsaka Yoshida; Fumio Takeda
- Book ID
- 112074774
- Publisher
- John Wiley and Sons
- Year
- 1984
- Tongue
- English
- Weight
- 575 KB
- Volume
- 67
- Category
- Article
- ISSN
- 8756-6621
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