New Observations in LOD Effect of 45-nm P-MOSFETs With Strained SiGe Source/Drain and Dummy Gate

✍ Scribed by Chung-Yun Cheng; Yean-Kuen Fang; Jang-Cheng Hsieh; Sheng-Jier Yang; Yi-Ming Sheu; Hsia, H.

• Book ID: 114619669
• Publisher: IEEE
• Year: 2009
• Tongue: English
• Weight: 999 KB
• Volume: 56
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2009.2022690