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New nanostructured silicon films grown by PECVD technique under controlled powder formation conditions

✍ Scribed by R. Martins; H. Águas; A. Cabrita; P. Tonello; V. Silva; I. Ferreira; E. Fortunato; L. Guimarães


Book ID
108370457
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
216 KB
Volume
69
Category
Article
ISSN
0038-092X

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