New n-Type Transparent Conducting Oxides

✍ Scribed by Minami, Tadatsugu (author)

• Book ID: 120986145
• Publisher: Materials Research Society
• Year: 2000
• Tongue: English
• Weight: 368 KB
• Volume: 25
• Category: Article
• ISSN: 0883-7694
• DOI: 10.1557/mrs2000.149

✦ Synopsis

Most research to develop highly transparent and conductive thin films has focused on n-type semiconductors consisting of metal oxides. Historically, transparent conducting oxide (TCO) thin films composed of binary compounds such as SnO~2~ and In~2~O~3~ were developed by means of chemical- and physical-deposition methods. Impurity-doped SnO~2~ (Sb- or F-doped SnO~2~, e.g., SnO~2~:Sb or SnO~2~: F) and In~2~O~3~: Sn (indium tin oxide, ITO) films are in practical use. In addition to binary compounds, ternary compounds such as Cd~2~SnO~4~, CdSnO~3~, and CdIn~2~O~4~ were developed prior to 1980, but their TCO films have not yet been used widely.