✦ LIBER ✦
New method to evaluate materials outgassing used in MEMS thin film packaging technology
✍ Scribed by Savornin, B.; Baillin, X.; Blanquet, E.; Nuta, I.; Saint Patrice, D.; Nicolas, P.; Charvet, P.L.; Pornin, J.L.
- Book ID
- 121944867
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 392 KB
- Volume
- 107
- Category
- Article
- ISSN
- 0167-9317
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