New material speeds wafer production

• Book ID: 104379374
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 68 KB
• Volume: 2006
• Category: Article
• ISSN: 1350-4789
• DOI: 10.1016/s1350-4789(06)71298-3

✦ Synopsis

A new graphite-based gasket material that complies with the latest TA-Luft requirements has been produced by a joint project between Swiss-based Klinger AG and GrafTech in the US.

The new material, Klinger graphite laminate TSM, has been tested for compliance with the latest leakage requirements for gaskets according to VDI 2440, which permit a maximum of 1 × 10 -4 mbar.l (s.m) at 1 bar of helium. The leak rate on 2 mm thick sheet was 9.92 × 10 -6 mbar.l (s.m). This new material has a leak rate that is reduced by a factor of 250 compared with the standard grade materials such as SLS and PSM.