New mass spectrometric data to aid etching and growth studies of GaAs using As and Ga trichlorides

✍ Scribed by S.M. Mokler; P.R. Watson

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 359 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)90129-7