New insights into aging phenomena from plasma chemistry

✍ Scribed by Hirotsugu Yasuda

• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 356 KB
• Volume: 515
• Category: Article
• ISSN: 0168-9002
• DOI: 10.1016/j.nima.2003.08.125

✦ Synopsis

While gas discharges under atmospheric pressure occur as filamentary discharges, most studies on plasma polymerization, or plasma Chemical Vapor Deposition, were carried out in low-pressure (low-temperature, nonequilibrium) plasma. However, it is reasonable to assume that the fundamentals of plasma polymerization found by low-pressure discharge apply to the gas phase in the filamentary discharge. Plasma polymerization as a potential cause of aging effects is reviewed with respect to (1) polymerization in DC discharge, (2) competitive ablation and polymerization principle, and (3) from the viewpoint of detector wire aging.