New Horizons of Applied Scanning Electron Microscopy

✍ Scribed by Kenichi Shimizu, Tomoaki Mitani (auth.)

• Publisher: Springer-Verlag Berlin Heidelberg
• Year: 2010
• Tongue: English
• Leaves: 171
• Series: Springer Series in Surface Sciences 45
• Edition: 1
• Category: Library

✦ Synopsis

In modern scanning electron microscopy, sample surface preparation is of key importance, just as it is in transmission electron microscopy. With the procedures for sample surface preparation provided in the present book, the enormous potential of advanced scanning electron microscopes can be realized fully. This will take the reader to an entirely new level of scanning electron microscopy and finely-detailed images never seen before.

✦ Table of Contents

Front Matter....Pages I-XIV
Introduction....Pages 1-2
Application Example 1: Lateral Resolution of in-Lens SE and High-Angle BSE Imaging at Low Accelerating Voltages, Below 2.0 kV....Pages 3-6
Application Example 2: Z-Contrast Sensitivity in Low-Voltage, High-Angle BSE Imaging....Pages 7-10
Application Example 3: Information Depth in Low-Voltage, High-Angle BSE Imaging....Pages 11-12
Application Example 4: Nano Inclusions in Co-Hardened Gold Plating for Electronic Applications – Further Evidence for High Lateral Resolution in Low-Voltage, High-Angle BSE Imaging....Pages 13-16
Application Example 5: A Thin Layer of Organic Contaminant on the Surface of Mirror-Polished Al-Based Hard Disks....Pages 17-19
Application Example 6: A Further Potential of Ultralow-Voltage In-lens SE Imaging....Pages 21-22
Application Example 7: Sample Surface Preparation by Ultramicrotomy Using a Diamond Knife for Cross-Sectional Examination of Various Coatings on Metals....Pages 23-24
Application Example 8: Cross-Sectional Examination of a Galvanized Steel....Pages 25-27
Application Example 9: Cross-Sectional Examination of a Painted Steel....Pages 29-30
Application Example 10: Cross-Sectional Examination of Solder Joint of the Printed Circuit Board....Pages 31-32
Application Example 11: Cross-Sectional Examination of a Tin-Plated Copper Sheet for Electronic Application....Pages 33-35
Application Example 12: Cross-Sectional Examination of an Anodized Aluminum Alloy for Aerospace Application....Pages 37-38
Application Example 13: Cross-Sectional Examination of a Porous Anodic Oxide Film Grown on a Heterogeneous Al-Fe Alloy....Pages 39-40
Application Example 14: Corrosion of an Al 2024-T3 Alloy for Aerospace Application....Pages 41-43
Application Example 15: Cross-Sectional Examination of an Etched Al Foil for Capacitor Application....Pages 45-48
Application Example 16: On the Nature of rf-GD Sputtering....Pages 49-51
Application Example 17: On the Surface Damages Associated with rf-GD Sputtering....Pages 53-55
Application Example 18: Precipitates in a Stainless Steel....Pages 57-60
Application Example 19: Ferrite Precipitates in a Low-Carbon Stainless Steel....Pages 61-63
Application Example 20: A Novel Use of rf-GD Sputtered Surfaces for Oxidation Study of Iron, Nickel, and Copper....Pages 65-77
Application Example 21: Preparation of “Highly Flat and Damage-Free” Surfaces for High-Resolution Channeling BSE Imaging....Pages 79-89
Application Example 22: Oxidation of Sputtered Metal Surface in Air – The Main Cause of Surface Alternation....Pages 91-95
Application Example 23: Microstructure of a Ti Alloy....Pages 97-98
Application Example 24: Microstructure of a Ni-Based Super Alloy for Aerospace Applications....Pages 99-100
Application Example 25: Cracks in a Nitrogen-Doped Stainless Steel....Pages 101-103
Application Example 26: Sample Surface Preparation Using rf-GD Sputtering for Cross-Sectional Examination....Pages 105-107
Application Example 27: Cross-Sectional Examination of a Galvanized Steel for Car Bodies....Pages 109-113
Application Example 28: Cross-Sectional Examination of a Flash Memory Device....Pages 115-121
Application Example 29: Cross-Sectional Examination of a Multilayered Glass....Pages 123-124
Application Example 30: Cross-Sectional Examination of a Copper Sheet for Electronic Application....Pages 125-126
Application Example 31: Cross-Sectional Examination of a Nitrided Carbon Steel....Pages 127-129
Application Example 32: Cross-Sectional Examination of Deformed Surface Regions of Carbon Steel after Shot Peening....Pages 131-133
Application Example 33: Cross-Sectional Examination of a Thermal-Sprayed WC-18% Co Coating on a Titanium Alloy....Pages 135-139
Application Example 34: Cross-Sectional Examination of a Thermal Barrier Coating on the Ni-based Super Alloy for Aerospace Applications....Pages 141-143
Application Example 35: Is EDX Elemental Mapping Really Necessary?....Pages 145-152
Application Example 36: Titanium Carbide Precipitates in a Duplex Stainless Steel....Pages 153-156
Application Example 37: Adhesion Between the Hard Chromium Coating and Copper Substrate....Pages 157-159
Application Example 38: On the Possibility of the Use of rf-GD Sputtering for Follow-Up Treatment of Thin Slices for TEM Examination....Pages 161-162
Application Example 39: On 3D Imaging of Semiconductor Devices by FE-SEM....Pages 163-166
Concluding Remarks....Pages 167-171
Back Matter....Pages 173-179

✦ Subjects

Surfaces and Interfaces, Thin Films;Measurement Science and Instrumentation;Solid State Physics;Spectroscopy and Microscopy;Nanotechnology;Nanotechnology and Microengineering