✦ LIBER ✦
New high-efficiency quasi-continuous operation of an ArF(BâX) excimer lamp excited by microwave discharge
✍ Scribed by Kumagai, Hiroshi; Obara, Minoru
- Book ID
- 121502260
- Publisher
- American Institute of Physics
- Year
- 1989
- Tongue
- English
- Weight
- 416 KB
- Volume
- 55
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.102247
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