New geometry in Sputtering technology : E. D. Segal. Solid St. Technol. 100 (1973)

• Publisher: Elsevier Science
• Year: 1974
• Tongue: English
• Weight: 112 KB
• Volume: 13
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(74)90548-4