New generation of highly stable high-temperature microelectromechanical transducers based on a silicon-on-isolator heterostructure

✍ Scribed by L. V. Sokolov

• Book ID: 106465758
• Publisher: Springer US
• Year: 2009
• Tongue: English
• Weight: 130 KB
• Volume: 52
• Category: Article
• ISSN: 0543-1972
• DOI: 10.1007/s11018-009-9383-3