𝔖 Bobbio Scriptorium

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New flexible reactor design for R&D PECVD deposition systems

✍ Scribed by R. Arendt; M. Kaiser; B. Bontschew; H.-J. Frenck

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 429 KB
Volume: 59
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(93)90073-w

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