New exhibition stimulus for giant OEM market

• Publisher: Elsevier Science
• Year: 1978
• Tongue: English
• Weight: 111 KB
• Volume: 28
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(78)80545-4

✦ Synopsis

It contains data showing film thickness distribution and deposition rates obtained with the Orbitorr. Theory of operation and the unique ability of the Orbitorr to achieve high target utilization efficiency are also described.