New effects resulting from the co-operation between process engineering and equipment design in IC fabrication : Ulf Gottschling, Jena Rev. 1, 10 (1989)

• Book ID: 103285539
• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 109 KB
• Volume: 30
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(90)90515-o