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New developments in MEMS using SiC and TiNi shape memory alloy materials

✍ Scribed by Christian A Zorman; Mehran Mehregany; Harold Kahn; Arthur H Heuer

Book ID: 117757077
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 678 KB
Volume: 2
Category: Article
ISSN: 1359-0286
DOI: 10.1016/s1359-0286(97)80046-0

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