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New developments in beam induced current methods for the failure analysis of VLSI circuits

✍ Scribed by D.S.H. Chan; J.C.H. Phang; W.S. Lau; V.K.S. Ong; V Sane; S Kolachina; T. Osipowicz; F. Watt

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 550 KB
Volume: 31
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(95)00326-6

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